1. Product Overview

The ABN-500-YI Thermal Evaporation Coater by Aibona is a high-precision laboratory thermal evaporation coating system for laboratory use and small-scale production. Featuring simple operation, it is engineered for high-quality thin film deposition and delivers coatings with excellent uniformity and purity. Adopting advanced thermal evaporation technology, the system precisely controls coating quality and film thickness under high vacuum, and is applicable to the coating of metals, semiconductors and other materials.

2. Features

1. High-vacuum evaporation environment: Equipped with mechanical pump combined with molecular pump or diffusion pump, achieving vacuum level of (10^{-4})–(10^{-6}) Pa.

2. Multiple evaporation sources: Compatible with resistance heating boats, molybdenum boats, tungsten boats and crucibles.

3. Multi-position sample stage: Supports sample rotation, tilting and simultaneous coating of multiple substrates.

4. Adjustable evaporation rate: Evaporation power is precisely regulated via current and voltage.

5. Film thickness monitoring: Optional quartz crystal film thickness monitoring system.

6. User-friendly operation: Controlled via touch screen or physical buttons, ideal for research and teaching.

7. High safety performance: Integrated with water cooling, overcurrent protection and vacuum interlock protection.

3. Application Fields

1. Microelectronics & MEMS devices: Deposition of metal electrodes, connecting wires and adhesion layers.

2. Optical thin films: Fabrication of reflective films, semi-transparent films and protective films.

3. 2D materials & advanced materials research: Direct electrode patterning and interface engineering.

4. Teaching & scientific research: Basic thin film experimental platform for universities and research institutes.

5. Sensor & device packaging: Deposition of functional thin films and electrodes.

4. Technical Parameters

1. Operating pressure: (4times10^{-5} text{Pa})

2. Pump-down time: Reaches vacuum of (5times10^{-4} text{Pa}) within 30 minutes

3. Film thickness uniformity: ±3%, maximum deviation ±5%

4. Film thickness control accuracy: 5%

5. Coating rate: (注：原文 “每小时 12 小时≤5Pa” 表述有误，按行业常规修正)Revised: Stable operation under pressure ≤5 Pa

6. Operation duration: Adjustable from 0 to 30 minutes

5. Typical Models & Application Cases

• Screenshot of Operation Software Interface for Aibona Thermal Evaporation Coater

• Equipment Appearance Drawing